OPTICAL DISK MASTER DISK, STAMPER FOR OPTICAL DISK SUBSTRATE, MANUFACTURING METHOD OF THESE DISKS, AND MAGNETO-OPTICAL RECORDING MEDIUM
作者： Nishigori Keiji , Tanaka Kojiro , Konishi Masato
DOI:
关键词: Magneto optical 、 Process (computing) 、 Irradiation 、 Layer (electronics) 、 Materials science 、 Substrate (printing) 、 Photoresist 、 Optical disc 、 Light beam 、 Optoelectronics
摘要: PROBLEM TO BE SOLVED: To provide a stamper for an optical disk suitable high-density recording by eliminating exposure in the cutting process of master and fine ruggedness formed development process. SOLUTION: The manufacturing method includes which photoresist layer is on glass disk, irradiated with light beam to expose photoresist, after developed form recessed part corresponding part, ion treatment thickness decreased until has predetermined depth irradiating ion.
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