Gas-phase nanoparticle formation and transport during pulsed laser deposition of Y1Ba2Cu3O7−d

作者: D. B. Geohegan , A. A. Puretzky , D. J. Rader

DOI: 10.1063/1.124180

关键词: Temperature gradientRayleigh scatteringThermophoresisNanoparticleSpectroscopyMaterials scienceOxygenDeposition (phase transition)Analytical chemistryPulsed laser deposition

摘要: The gas-phase growth and transport of nanoparticles are characterized at the low background oxygen pressures used for pulsed laser deposition high-Tc Y1Ba2Cu3O7−d superconducting films. Onset times nanoparticle formation were determined by intensified charge-coupled device imaging optical spectroscopy laser-induced fluorescence from diatomic oxides Rayleigh scattering gas-suspended nanoparticles. Nanoparticles detected above 175 mTorr room temperature, with continuing during seconds within cloud stopped vapor near heater surface. Elevated temperatures create density gradients which result in reduced resistance to initial plume expansion. temperature gradient also moves away surface as they grow, effectively limiting time spatial confinement necessary continued or aggregation, inhibiting thermophoresis.

参考文章(9)
David B. Geohegan, Alex A. Puretzky, Gerd Duscher, Stephen J. Pennycook, Photoluminescence from gas-suspended SiOx nanoparticles synthesized by laser ablation Applied Physics Letters. ,vol. 73, pp. 438- 440 ,(1998) , 10.1063/1.121892
James M. Lafferty, Lawrence G. Rubin, Foundations of Vacuum Science and Technology Physics Today. ,vol. 52, pp. 86- 88 ,(1999) , 10.1063/1.882616
D J Rader, A S Geller, Particle transport modelling in semiconductor process environments Plasma Sources Science and Technology. ,vol. 3, pp. 426- 432 ,(1994) , 10.1088/0963-0252/3/3/028
Tatsuo Okada, Mitsuo Maeda, Laser spectroscopic studies of pulsed-laser deposition process for high-Tc thin films Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 47, pp. 64- 69 ,(1997) , 10.1016/S0921-5107(96)01881-8
David B. Geohegan, Alex A. Puretzky, Gerd Duscher, Stephen J. Pennycook, Time-resolved imaging of gas phase nanoparticle synthesis by laser ablation Applied Physics Letters. ,vol. 72, pp. 2987- 2989 ,(1998) , 10.1063/1.121516
Takehito Yoshida, Shigeru Takeyama, Yuka Yamada, Katsuhiko Mutoh, Nanometer‐sized silicon crystallites prepared by excimer laser ablation in constant pressure inert gas Applied Physics Letters. ,vol. 68, pp. 1772- 1774 ,(1996) , 10.1063/1.116662
Hendrik Christoffel van de Hulst, Light Scattering by Small Particles ,(1981)
Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda, Observation of the behavior of a laser‐ablated plume by laser imaging spectroscopic techniques Electrical Engineering in Japan. ,vol. 124, pp. 18- 26 ,(1998) , 10.1002/(SICI)1520-6416(199809)124:4<18::AID-EEJ3>3.0.CO;2-N