Capacitive sensors and methods of fabrication

作者: Vladek Kasperchik , Lorraine Byrne , Kevin Dooley , Graeme Scott

DOI:

关键词: NanotechnologyAnalyteDielectricOptoelectronicsFabricationCapacitanceMaterials scienceCapacitive sensingCapacitive displacement sensorData acquisition

摘要: Apparatus and methods related to capacitive sensors are provided. Metal walls formed in an interdigitated pattern. A dielectric material corresponding a selected analyte is deposited contact with the metal thus defining sensor. Exposure causes electrical capacitance vary accordance intensity. Analyte detection or measurement, data acquisition, other operations can be performed by way of present teachings.

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