Piezoelectric resonator plate and piezoelectric resonator device
作者： Syunsuke Satoh , Shinichi Koyama
DOI:
关键词: Piezoelectric resonators 、 Ultrasonic sensor 、 Acoustics 、 Composite material 、 Materials science 、 Stress (mechanics) 、 Dielectric resonator antenna 、 PMUT 、 Base (geometry)
摘要: A piezoelectric resonator device comprises a plate, base for holding the lid hermetically enclosing plate held on base, and support member made of brittle material reducing external stress to plate. The is via member. In this case, are bonded with each other using bonding (connection bumps) by FCB ultrasonic waves. electrically mechanically in plurality areas Also, an area
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