Bending in VO2-coated microcantilevers suitable for thermally activated actuators
作者： Armando Rúa , Félix E. Fernández , Nelson Sepúlveda
DOI: 10.1063/1.3369282
关键词: Coating 、 Pulsed laser deposition 、 Curvature 、 Composite material 、 Actuator 、 Deflection (engineering) 、 Cantilever 、 Silicon 、 Atmospheric temperature range 、 Materials science
摘要: The curvature of VO2-coated silicon microcantilevers was measured as the temperature cycled through coating’s insulator-to-metal transition (IMT), which drives change mainly strain generated during this reversible structural transformation. films were grown by pulsed laser deposition (PLD) on heated substrates. Cantilever tip displacement for a 130 μm long cantilever changed recording deflection beam, and estimated film stress calculated from data. A in over 2000 m−1 observed narrow range IMT, with maximum rate ∼485 m−1 per degree. Estimated recoverable ∼1 GPa region. These results suggest applications actuator devices reduced dimensions, including submicron lengths, multifunctional capabilities, possibly higher operational frequencies than other thermally actuated devices.
scitation.org
harvard.edu
sci-hub.se 参考文章(24)
F. J. Morin, Oxides Which Show a Metal-to-Insulator Transition at the Neel Temperature Physical Review Letters. ,vol. 3, pp. 34- 36 ,(1959) , 10.1103/PHYSREVLETT.3.34
J. R. Barnes, R. J. Stephenson, M. E. Welland, Ch. Gerber, J. K. Gimzewski, Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device Nature. ,vol. 372, pp. 79- 81 ,(1994) , 10.1038/372079A0
M. Marezio, D. B. McWhan, J. P. Remeika, P. D. Dernier, Structural Aspects of the Metal-Insulator Transitions in Cr-Doped V O 2 Physical Review B. ,vol. 5, pp. 2541- 2551 ,(1972) , 10.1103/PHYSREVB.5.2541
P. Krulevitch, A.P. Lee, P.B. Ramsey, J.C. Trevino, J. Hamilton, M.A. Northrup, Thin film shape memory alloy microactuators IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 5, pp. 270- 282 ,(1996) , 10.1109/84.546407
M. Ghedira, H. Vincent, M. Marezio, J.C. Launay, Structural aspects of the metal-insulator transitions in V0.985Al0.015O2 Journal of Solid State Chemistry. ,vol. 22, pp. 423- 438 ,(1977) , 10.1016/0022-4596(77)90020-2
S. Lysenko, V. Vikhnin, F. Fernandez, A. Rua, H. Liu, Photoinduced insulator-to-metal phase transition in V O 2 crystalline films and model of dielectric susceptibility Physical Review B. ,vol. 75, pp. 075109- ,(2007) , 10.1103/PHYSREVB.75.075109
J. R. Barnes, R. J. Stephenson, C. N. Woodburn, S. J. O’Shea, M. E. Welland, T. Rayment, J. K. Gimzewski, Ch. Gerber, A femtojoule calorimeter using micromechanical sensors Review of Scientific Instruments. ,vol. 65, pp. 3793- 3798 ,(1994) , 10.1063/1.1144509
Stephen Timoshenko, None, Analysis of Bi-Metal Thermostats Journal of the Optical Society of America. ,vol. 11, pp. 233- 255 ,(1925) , 10.1364/JOSA.11.000233
S. Lysenko, A. Rúa, V. Vikhnin, F. Fernández, H. Liu, Insulator-to-metal phase transition and recovery processes in V O 2 thin films after femtosecond laser excitation Physical Review B. ,vol. 76, pp. 035104- ,(2007) , 10.1103/PHYSREVB.76.035104
Claude A. Klein, How accurate are Stoney’s equation and recent modifications Journal of Applied Physics. ,vol. 88, pp. 5487- 5489 ,(2000) , 10.1063/1.1313776