Sub-25-nm laboratory x-ray microscopy using a compound Fresnel zone plate

作者: Olov von Hofsten , Michael Bertilson , Julia Reinspach , Anders Holmberg , Hans M. Hertz

DOI: 10.1364/OL.34.002631

关键词: OpticsZone plateMicroscopeResolution (electron density)PhysicsPhoton countingMicroscopyX-ray opticsFresnel zoneStray lightAtomic and Molecular Physics, and Optics

摘要: Improving the resolution in x-ray microscopes is of high priority to enable future applications nanoscience. However, high-resolution zone-plate optics often have low efficiency, which makes implementation laboratory difficult. We present a microscope based on compound zone plate. The plate utilizes multiple diffraction orders achieve while maintaining reasonable efficiency. analyze illumination conditions necessary for this type order suppress stray light and demonstrate microscopic imaging resolving 25 nm features.

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