High frequency ultrasonic transducers with near optimal efficiency
作者： M. Lippert , C. Bruneel , F. Bruneel
DOI: 10.1063/1.1149264
关键词: Electromechanical coupling coefficient 、 Optoelectronics 、 Vacuum evaporation 、 Ultrasonic sensor 、 Lithium niobate 、 Capacitive micromachined ultrasonic transducers 、 PMUT 、 Piezoelectricity 、 Materials science 、 Indium
摘要: We present a technique for indium bonding lithium niobate single crystal (LiNbO3) on substrate using vacuum evaporation. This is realized at room temperature and under atmospheric pressure. also of characterization based the measurement electric impedance these transducers we show that with this obtain good piezoelectric transducers, an electromechanical coupling coefficient about 98% theoretical value.
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