Two axis plane mirror interferometer

摘要: An interferometer system includes an integrated structure including a plurality of optical systems on unitary glass cube for the element. The dual integrated, parallel interferometers to form two axis in Each is 90 degree version straight line interferometer, with plane mirror laser beam path each single interferometer. contains diagonal polarization interface between segments which are bonded together. Cube corners and quarter wave plates employed. A half plate employed one design. prealigned assembly it measures translation version, theta another pitch, version.