Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching
作者： Aaron T. Radomski , Aaron M. Burry , Aung Toe , Jesse N. Klein
DOI:
关键词: RF power amplifier 、 Radio frequency 、 Automatic frequency control 、 Physics 、 Signal generator 、 Impedance matching 、 Acoustics
摘要: A radio frequency (RF) generator includes a RF power source configured to generate an output signal at frequency. The tuning module. module generates control that controls the of source. component and perturbation component. varies electrical parameter signal. is adjusted in accordance with change response
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