R.f. sputtered MoS2 parameter effects on wear life

摘要: Abstract Flat washer specimens of various r.f. sputtered MoS2 coatings were subjected to sliding loads on a standard thrust tester determine the relationship between coating parameters and wear life. Argon pressure, target-to-substrate distance, wattage target, duration sputter etch cleaning, in addition thickness, varied. All testing was performed nitrogen atmosphere. The applied using planar target diameter 25.4 cm diode mode without substrate biasing. Testing conducted two phases. first phase single variable test; second factorial design. Some initial difficulty experienced obtaining adequate test samples owing insufficient flatness surface finish sample material; this overcome by polishing material mirror finish. In testing, analysis variance Yates' method used obtain maximum information for number used. results one indicate that life increases as distance is decreased chamber pressure increased; decreases cleaning has little or no effect life; strongly dependent, expected, thicker films providing longer Phase indicated distance-pressure interaction most significant factor affecting Chamber found be only having effect.