Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor
作者： Jiaqi Wang , Jun Yu
DOI: 10.3390/MI6111443
关键词: Optoelectronics 、 Resistor 、 Operational amplifier 、 Thermistor 、 Tungsten 、 Silicon 、 Nanotechnology 、 Materials science 、 CMOS 、 Biasing 、 Fabrication
摘要: … During application of the sensor, the ambient temperature would be controlled to be as stable as possible, so R 2 was nearly constant and the current through R 2 was also considered …
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