Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure
作者： James J. Cordingley , Donald V. Smart , Joseph J. Griffiths
DOI:
关键词: Optics 、 Laser 、 Materials science 、 Pulse (physics) 、 Substrate (printing) 、 Biomedical engineering 、 Pulsed laser beam 、 Microstructure 、 Process (computing) 、 Energy (signal processing)
摘要: A method and system for locally processing a predetermined microstructure formed on substrate without causing undesirable changes in electrical or physical characteristics of the other structures are provided. The includes providing information based model laser pulse interactions with microstructure, structures. At least one characteristic at is determined information. pulsed beam generated including pulse. further irradiating having into spot microstructure. sufficient to process changes.
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