Ion Scattering spectrometer with two analyzers preferably in tandem

作者： James T. Mckinney , Robert F. Goff

DOI:

关键词: Analytical chemistry 、 Ion beam 、 Spectrometer 、 Hybrid mass spectrometer 、 Mass spectrometry 、 Secondary ion mass spectrometry 、 Quadrupole mass analyzer 、 Spectrum analyzer 、 Chemistry 、 Ion

摘要: Improved apparatus and method for measuring ions scattered from a surface, to thereby determine the mass of atoms at surface. The includes two analyzers, preferably an energy analyzer positioned in tandem. may be tuned pass only having same as incident ion beam, reject sputtered ions, some which have requisite through under given set conditions.