Method and apparatus for smoothing surfaces on an atomic scale
作者： Jacques C. S. Kools , Adrian J. Devasahayam
DOI:
关键词: Smoothing 、 Analytical chemistry 、 Chemistry 、 Ion source 、 Atomic units 、 Ion 、 Noble gas 、 Remote plasma 、 Sputtering 、 Etching (microfabrication) 、 Optics
摘要: A method and an apparatus for smoothing surfaces on atomic scale. The invention performs of by use a low energy ion or neutral noble gas beam, which may be formed in source remote plasma source. process comprise post-deposition step (e.g., assist step) multilayer fabrication procedure. utilizes combinations relatively particle below the sputter threshold material) near normal incidence angles, achieve improved surface scale with substantially no etching surface.
google.co.uk 参考文章(31)
Daisuke Miyauchi, Satoru Araki, Magnetic multilayer film, method for making, and magnetoresistance device ,(1995)
Robin Frederick Charles Farrow, David Darden Chambliss, Ronald Franklin Marks, Eric Dean Tober, Self-assembled giant magnetoresistance lateral multilayer for a magnetoresistive sensor ,(1997)
Xiaowang Zhou, Junjie Quan, Hadyn N. G. Wadley, Apparatus and method for intra-layer modulation of the material deposition and assist beam and the multilayer structure produced therefrom ,(2000)
Laszlo Takacs, Gerald T. Mearini, Chemical-organic planarization process for atomically smooth interfaces ,(2001)
James A. Greer, Matthew C. Gwinn, Lester G. Crawford, James G. Bachand, Bruce K. Libby, Isao Yamada, Richard P. Torti, Gas cluster ion beam smoother apparatus ,(2000)
David B. Fenner, Interface control for film deposition by gas-cluster ion-beam processing ,(2001)
William P. Debley, John G. Larson, Apparatus and method for ion beam polishing and for in-situ ellipsometric deposition of ion beam films ,(1994)
Fenton Read Mcfeely, Steven Paul Kowalczyk, Paul Fredrich Seidler, Mark Monroe Banaszak Holl, Selective, low-temperature chemical vapor deposition of gold ,(1993)
Isao Yamada, Method for surface treatment with extra-low-speed ion beam ,(1992)
David B. Fenner, Adaptive GCIB for smoothing surfaces ,(1999)