A Compact, Easily Assembled Micromirror With Liquid Metal Pivot

摘要: We have developed a new approach to achieve high-speed micromirror, which can rapidly tilt large angles with low voltage and compact footprint. In our we use liquid metal drop vapor pressure as the pivot, micromirror is tilted by an electrostatic torque. Micromirrors (1 mm x 1 mm) actuating circuit are microfabricated centralized wetting area surrounded non-wetting Parylene confine drop. The frequency response curve shows that mirror has 78V snap-down resonant at 165Hz, potential more than 3k Hz if size of pivot reduced. A expected significantly higher reliability since does not suffer from mechanical fatigue. Due single point support, be in arbitrary direction, fabrication process simpler those required create solid torsional weak links.Copyright © 2003 ASME