Laser studies of the gas phase in chemical vapor deposition
作者： William G. Breiland , Michael E. Coltrin , Pauline Ho
关键词: Gas phase 、 Laser 、 Chemical engineering 、 Chemical vapor deposition 、 Materials science
摘要:
osapublishing.org参考文章(1)
G. Herzberg, R. D. Verma, Spectra and Structures of the Free HSiCl and HSiBr Radicals Canadian Journal of Physics. ,vol. 42, pp. 395- 432 ,(1964) , 10.1139/P64-038