Fabrication of nanostructures with laser interference lithography
作者： Q. Xie , M.H. Hong , H.L. Tan , G.X. Chen , L.P. Shi
DOI: 10.1016/J.JALLCOM.2006.02.115
关键词: Lithography 、 Fabrication 、 Photoresist 、 Interferometry 、 Optics 、 Standing wave 、 Interference (wave propagation) 、 Coating 、 Materials science 、 Optoelectronics 、 Anti-reflective coating
摘要: … Maskless nanostructure fabrication by laser interference … the photoresist to minimize the interference of vertical standing waves. … Three regions of laser intensity distributions and vertical …
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