Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
作者： Philip A. Deane , Mark W. Roberson , Joseph Mancusi
DOI:
关键词: Electronic engineering 、 Microelectromechanical systems 、 Capacitor 、 Substrate (printing) 、 Optoelectronics 、 Signal 、 Materials science 、 Actuator 、 Bimorph 、 Beam (structure) 、 Capacitance
摘要: A microelectromechanical system (MEMS) tunable capacitor having low loss and a corresponding high Q is provided. The includes first substrate plate disposed thereon. fixed pivot structure on the surface of substrate, proximate plate. as point attachment for flexible membrane that extends outward from generally overlies second attached to underside thereon such plates face one another in spaced apart relationship. MEMS actuator operably contact with purpose providing an actuation force membrane, thereby varying capacitance between plates. In advantageous embodiment invention are formed HTS material substrates may be signal compatible materials. device used provide include electrostatic film actuator, thermal arched beam bimorph piezoelectric or any other device. Additionally, method making
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