Acoustic wave device using plate modes with surface-parallel displacement

摘要: Solid-state acoustic sensors for monitoring conditions at a surface immersed in liquid and concentrations of species electrical properties are formed by placing interdigital input output transducers on piezoelectric substrate propagating plate modes therebetween. The deposition or removal material from, respectively, thin film contact with the surface, changes mechanical characteristics solution, create perturbations velocity attenuation as function these them.