Molecular dynamics study on the mechanism of AFM-based nanoscratching process with water-layer lubrication
作者： Jiaqi Ren , Jinsheng Zhao , Zeguang Dong , Pinkuan Liu
DOI: 10.1016/J.APSUSC.2015.03.177
关键词: Nanolithography 、 Nanoscopic scale 、 Molecular dynamics 、 Composite material 、 Normal force 、 Scratching 、 Materials science 、 Nanotechnology 、 Monocrystalline silicon 、 Deformation (engineering) 、 Lubrication
摘要: … atomic/molecular massively parallel simulator (LAMMPS). As shown in Fig. 1, the schematic model used in the MD simulation of AFM-based water-lubricated nanoscratching process …
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