LASER PROCESSING METHOD
作者： Sato Mitsuru , Oikawa Hiroshi
DOI:
关键词: Laser processing 、 Shock (mechanics) 、 Process (computing) 、 Materials science 、 Vibration 、 Pulsed laser deposition 、 Laser 、 Buffer (optical fiber) 、 Vacuum pump 、 Optoelectronics
摘要: PROBLEM TO BE SOLVED: To provide a laser processing method, by which the effect due to shock and vibration of light is eliminated so as carry out precise processing, adhesion debris reverse face member prevented process through hole simply. SOLUTION: A fiber type 21 with good permeability put on stage 22, 20 arranged thereon. The adsorbed fixed via being sucked from permeable 31 22 means vacuum pump 23. When performed irradiation pulse light, functions buffer material restrain vibration. generated at that time, oxidized blown off an assist gas 32. After penetration 20, sucking, not adhered 20. Further, since broken, next step can be started only changing after processing.
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