A micromachined polyurethane/stainless-steel capacitive pressure sensor without cavity and diaphragm
作者： K. Takahata , Y.B. Gianchandani
DOI: 10.1109/SENSOR.2005.1496459
关键词: Surface micromachining 、 Electromagnetic coil 、 Capacitive sensing 、 Diaphragm (mechanical device) 、 Machining 、 Pressure sensor 、 Composite material 、 Capacitance 、 Materials science 、 Layer (electronics)
摘要: This paper reports micromachined capacitive pressure sensor intended for applications that require mechanical robustness. The device is constructed with two metal electrode plates and an intermediate polymer layer soft enough to deform in a target range. are formed of stainless steel overall dimensions 4/spl times/2.4 mm/sup 2/ fabricated by batch-compatible micro-electro-discharge machining. A polyurethane RTV liquid rubber used as the deformable material. structure eliminates both vacuum cavity associated lead transfer challenges common sensors. For wireless interrogation capacitance, L-C tank combining 40-turn coil winding copper wire on sensor. preliminary measurement test performed monitoring frequency shift reactance peak varying shows its response 2.6-9.6 Hz/Pa measured over dynamic range 350 kPa. Temperature dependence also experimentally evaluated.
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