作者: P. Geittner , D. Küppers , H. Lydtin
DOI: 10.1063/1.88608
关键词: Chemical vapor deposition 、 Dispersion (optics) 、 Hybrid physical-chemical vapor deposition 、 Analytical chemistry 、 Combustion chemical vapor deposition 、 Materials science 、 Deposition (phase transition) 、 Optical fiber 、 Plasma 、 Substrate (chemistry) 、 Physics and Astronomy (miscellaneous)
摘要: … prepared by means of chemical vapor deposition (CVD) and modified CVD techniques. Although … A modified CVD method has been developed, 6 which is shown schematically in Fig. 1: …