Composition for nanoimprint, cured product, pattern forming method, and article having pattern

作者: Shimatani Satoshi

DOI:

关键词: MonomerCopolymerProduct patternOlefin fiberPhotoinitiatorMaterials sciencePolymer chemistryComposition (combinatorics)

摘要: A composition for nanoimprint including a cycloolefin-based copolymer; polymerizable monomer; and photoinitiator. The monomer of the present invention may include polyfunctional monomer, copolymer constituent unit having cyclic olefin an acyclic olefin.

参考文章(15)
Jun Fujita, Fred Boyle Mccormick, Tamon Tadera, Adhesive encapsulating composition and electronic devices made therewith ,(2009)
Frank Dr Osan, Michael-Joachim Dr Brekner, Jurgen Dr Rohrmann, Cycloolefin block copolymers and a process for their preparation ,(1993)
Brian L. Goodall, Saikumar Jayaraman, Edmund Elce, Robert A. Shick, Photodefinable dielectric compositions comprising polycyclic polymers ,(1997)
Martin P. Debreczeny, Abdul Tayeb, Diana Villegas, Randal Jordheim, Methods and devices for real time monitoring of collagen and for altering collagen status ,(2011)
Brian L. Goodall, Shenliang Sun, Saikumar Jayaraman, Larry F. Rhodes, Edmund Elce, W. Chris McDougall, Takashi Hirano, Jeffrey C. Krotine, Photosensitive compositions based on polycyclic polymers ,(2003)
Brian L. Goodall, Lawrence Seger, Larry F. Rhodes, Robert J. Duff, Lester H. McIntosh, Dissolution rate modifiers for photoresist compositions ,(2004)
Brian L. Goodall, Saikumar Jayaraman, Larry F. Rhodes, Robert A. Shick, Photoresist compositions comprising polycyclic polymers with acid labile pendant groups ,(1997)
Michael-Joachim Dr. Brekner, Ulrich Dr. Epple, Polymer blends of cycloolefin polymers and polyolefins ,(1993)
Laurent Malaquin, Jeremie Weber, Debjani Paul, Sandrine Miserere, Jean-Louis Viovy, Method for improving the bonding properties of microstructured substrates, and devices prepared with this method ,(2007)