Biomimetic nano/micro double-textured silicon with outstanding antireflective and super-hydrophilic surfaces for high optical performance

摘要: We report the fabrication of nano/micro double-textured silicon (NMDT-Si) and its structural, optical, surface wetting properties. The micro-pyramidal textured (MPTs) are formed on Si by a simple potassium hydroxide-based wet etching process. On other hand, for pillar-arrayed nano-textures (NTs), thermally-dewetted gold (Au) nanoparticles employed MPT-Si as an etch mask inductively coupled plasma is followed. optical reflectance NMDT-Si strongly dependent period height NTs MPT-Si, which can be controlled Au film thickness time, respectively. Compared with planar nano-textured Si, shows superior antireflection (or higher light absorption) light-scattered propagation behaviors, verified from finite-difference time-domain simulation, over wide ranges wavelengths (350–1100 nm) incident angles (0–70°), resulting in average ∼2.1% solar weighted absorption ∼98.5% at normal incidence, In addition, it has super-hydrophilic water contact <5°.