Evolution of sidewall adhesion in surface micromachines due to repetitive impact loading
作者： H. Xiang , K. Komvopoulos
DOI: 10.1063/1.3688353
关键词: Polycrystalline silicon 、 Microfabrication 、 Scanning electron microscope 、 Stiction 、 Nanotechnology 、 Composite material 、 Adhesion 、 Ambient pressure 、 Materials science 、 Phase (matter) 、 Surface modification
摘要: A contact-mode surface micromachine consisting of polycrystalline silicon was used to study the effect repetitive impact loading on evolution adhesion at sidewall contact interfaces under different conditions load, ambient pressure, and relative humidity. All micromachines demonstrated an initial run-in phase low stable force, followed by a modification characterized rapid increase interfacial force. The nonlinear force with cycles found be in direct correlation operation lifetime. criterion failure due excessive (stiction) formulated based observed experimental trend. Micromachine lifetime decreased nonlinearly maximum pressure. operated vacuum or high-humidity atmosphere increased faster than those dry atmosphere. Despite significan...
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