Semiconductor pressure, differential pressure transmitter
作者： Susumu Kimijima , Shozo Sato , Shunji Shiromizu
DOI:
关键词: Engineering 、 Semiconductor 、 Electrical engineering 、 Pressure differential 、 Strain (chemistry) 、 Long period 、 Acoustics 、 Pressure sensor
摘要: PURPOSE: To improve performance and stabilize characteristics over a long period of time by using strain inducing plate composed semiconductor at pressure transducer part. COPYRIGHT: (C)1977,JPO&Japio
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