Method of making field emission tips using physical vapor deposition of random nuclei as etch mask
作者： Nalin Kumar
DOI:
关键词: Base (geometry) 、 Physical vapor deposition 、 Field electron emission 、 Diamond 、 Optoelectronics 、 Nanotechnology 、 Photolithography 、 Materials science 、 Low work function
摘要: A method of making sub-micron low work function field emission tips without using photolithography. The includes physical vapor deposition randomly located discrete nuclei to form a discontinuous etch mask. In one embodiment an is applied material covered by in the material. another base which are then coated with tips. Diamond preferred
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