Linear Increases in Carbon Nanotube Density Through Multiple Transfer Technique

作者: Max M. Shulaker , Hai Wei , Nishant Patil , J. Provine , Hong-Yu Chen

DOI: 10.1021/NL200063X

关键词: Substrate (electronics)OptoelectronicsDensity scalingCarbon nanotubeMaterials scienceWaferNanotechnologyTarget surfaceDrain currentScaling lawField-effect transistor

摘要: We present a technique to increase carbon nanotube (CNT) density beyond the as-grown CNT density. perform multiple transfers, whereby we transfer CNTs from several growth wafers onto same target surface, thereby linearly increasing on substrate. This process, called of nanotubes through sacrificial layers, is highly scalable, and demonstrate linear scaling up 5 transfers. also that this results in an ideal drain−source currents field effect transistors (CNFETs). Experimental can be improved 2 8 CNTs/μm, accompanied by CNFET current 4.3 17.4 μA/μm.

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