Multispectral microbolometers for the midinfrared

作者: Thomas Maier , Hubert Brueckl

DOI: 10.1364/OL.35.003766

关键词: Thermal conductionOpticsOptoelectronicsBolometerScanning electron microscopeMaterials scienceThermalMetamaterialWavelengthElectromagnetic shieldingChemical vapor deposition

摘要: The spectral responsivity and the dynamic behavior of microbolometers with an integrated absorbing metamaterial are investigated. Wavelength tailoring and tuning in different …

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