Pressure type flow rate control apparatus
作者： Ryosuke Dohi , Yukio Minami , Nobukazu Ikeda , Koji Kawada , Hiroyuki Fukuda
DOI:
关键词: Volumetric flow rate 、 Detector 、 Control valves 、 Orifice plate 、 Body orifice 、 Materials science 、 Upstream (networking) 、 Flow coefficient 、 Mechanics 、 Signal 、 Control theory
摘要: A pressure type flow rate control apparatus (1) for controlling of a fluid maintains an upstream side P1 orifice at more than about twice downstream P2. In addition to orifice-forming member (5) the includes valve (2) provided orifice, detector (3) between and operation device (6) calculating Qc from detected as Qc=KP1 (K being constant) issuing difference signal Qy command Qs calculated drive unit valve. The is adjusted by opening closing valve, thereby rate.
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