Plasma generation electrode module, plasma generation electrode assembly, and apparatus for generating plasma using the same
作者： Heesoo Jung , Haewan Lee
DOI:
关键词: Materials science 、 Concentric 、 Optoelectronics 、 Electrode 、 Circumference 、 Analytical chemistry 、 Dielectric 、 Plasma 、 Plasma pencil
摘要: A plasma generation electrode module includes: a first and second electrodes formed to be spaced apart from one another; dielectric disposed between the insulate electrodes, wherein has shaft shape, cylindrical is in concentric with so as contact an outer circumference of cover electrode, dielectric, plurality through holes are on woven.
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