作者: Thomas A. Knecht , Roger L. Frick , Steven M. Bruesehoff
DOI:
关键词: Volume (thermodynamics) 、 Edge (geometry) 、 Composite material 、 Pressure measurement 、 Optics 、 Materials science 、 Pressure sensor 、 Membrane
摘要: The invention relates to a differential pressure sensor having low hysteresis volume. Said comprises element (1), two measuring chambers (21, 31) which lie adjacent the element, receiving (22, 32) are closed by separating membranes 31), and overload (23, 33) separated an membrane (6), said (6) comprising outer edge inner being firmly fixed along thereof.