作者: M. Grundner , J. Halbritter
DOI: 10.1063/1.327386
关键词: Auger electron spectroscopy 、 Electropolishing 、 Oxide 、 Dielectric 、 Annealing (metallurgy) 、 Analytical chemistry 、 Materials science 、 Impurity 、 Niobium 、 X-ray photoelectron spectroscopy
摘要: … positive charging due to ionizing of oxygen vacancies, which plays an important role … vacancies are neutralized rapidly ( - I 0 ~ 10 sec) in such thin oxides because the oxygen vacancies …