Combustion Flame Deposition of Diamond
作者： Colin A. Wolden , Zlatko Sitar , Robert F. Davis
DOI: 10.1007/978-3-642-71992-9_3
关键词: Welding 、 Hydrogen 、 Flame speed 、 Combustion 、 Chemical vapor deposition 、 Diamond 、 Combustion chemical vapor deposition 、 Process engineering 、 Deposition (phase transition)
摘要: Combustion synthesis is one of the competing chemical vapor deposition (CVD) technologies for diamond film growth. It was invented in 1988 by Hirose [3.1], who realized that acetylene flames produce copious amounts atomic hydrogen and hydrocarbon radicals are required The discovery subsequently confirmed at Naval Research Laboratory [3.2] has become subject intensive study. been argued combustion most flexible CVD alternatives because its scaleable nature, minimal utility requirements, significantly reduced capital costs relative to plasmaaided processes [3.3]. In this chapter, development will be discussed from inception, when conventional welding torches were used, present implementation with flat-flame burners. unique features system highlighted. key experimental parameters, their impact on deposition, detail. chemistry relation mechanism analyzed through a combination in-situ diagnostics detailed reactor modeling. Lastly, examples specific applications provided.
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