Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation
作者： Tomáš Kocourek , Michal Růžek , Michal Landa , Miroslav Jelínek , Jan Mikšovský
DOI: 10.1016/J.SURFCOAT.2011.01.038
关键词: Materials science 、 Resonant ultrasound spectroscopy 、 Composite material 、 Analytical chemistry 、 Synthetic diamond 、 Nanoindentation 、 Indentation 、 Layer (electronics) 、 Pulsed laser deposition 、 Diamond-like carbon 、 Diamond cubic
摘要: Abstract Elastic properties of diamond-like carbon (DLC) layers with gradient carbon–silicon interlayer were studied by resonant ultrasound spectroscopy (RUS) and standard nano-indentation technique. The DLC prepared pulsed laser deposition on SiC/Si substrates. RUS method is based modal analysis the specimen vibration. frequency shifts caused layer are for evaluation dynamic in-plane elastic deposited DLC. results compared quasi-statical quantities — Young's modulus hardness, obtained nanoindentation using AFM tip.
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