Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

摘要: This invention is a new type of relay that incorporates the functional combination multimorph actuator elements with electrostatic state holding mechanisms in development micromachined switching device. provides benefits high-force actuators those zero-power capacitive latching microfabricated relays high reliability and low power consumption. The operation allows for several stable states device: passive using no power, an active driving some latched electrostatically switch requiring essentially power. Multimorph covered by this include piezoelectric, thermal, buckling actuation mechanisms. These devices use one or more sets armatures cantilever fixed-beam configurations, latch electrodes holding.