Adhesion strength and nanomechanical characterization of ZnO thin films
作者： Vipul Bhardwaj , Rajib Chowdhury , Rengaswamy Jayaganthan
DOI: 10.1557/JMR.2017.85
关键词: Sputtering 、 Fused quartz 、 Sputter deposition 、 Microstructure 、 Crystallinity 、 Thin film 、 Materials science 、 Indentation 、 Nanoindentation 、 Composite material
摘要: The present study was focused to investigate mechanical properties of ZnO thin films deposited on fused quartz substrates at different sputtering deposition pressures (5, 10, 15, and 20 mTorr) using DC sputtering. crystallinity microstructure show a marked influence the films. structural evolution is in (002) plane influenced by pressure. intensity peak rises initially decreases with further increasing such as hardness, Young’s modulus, coefficient friction were measured three-sided pyramidal Berkovich nanoindentation. adhesion strength scratch test under ramp loading. Load–displacement profile continuous indentation cycle without any discontinuity revealed no fracture, cracking event, defects, which consequence dense good adherence substrate.
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sci-hub.se 参考文章(56)
Li-Ping Peng, A-Ling He, Liang Fang, Xiao-Fei Yang, Structure and properties of indium-doped ZnO films prepared by RF magnetron sputtering under different pressures Rare Metals. pp. 1- 5 ,(2015) , 10.1007/S12598-015-0661-8
Aliza Aini Md Ralib, Anis Nurashikin Nordin, Noreha A. Malik, Raihan Othman, A. H. M. Zahirul Alam, Sheroz Khan, Ossama Mortada, Aurelian Crunteanu, Matthieu Chatras, Jean Christophe Orlianges, Pierre Blondy, A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 23, pp. 3851- 3862 ,(2017) , 10.1007/S00542-015-2783-1
Andrew J. Gayle, Robert F. Cook, Mapping viscoelastic and plastic properties of polymers and polymer-nanotube composites using instrumented indentation Journal of Materials Research. ,vol. 31, pp. 2347- 2360 ,(2016) , 10.1557/JMR.2016.207
V.A. Coleman, C. Jagadish, Chapter 1 – Basic Properties and Applications of ZnO Zinc Oxide Bulk, Thin Films and Nanostructures#R##N#Processing, Properties and Applications. pp. 1- 20 ,(2006) , 10.1016/B978-008044722-3/50001-4
Claus F Klingshirn, Bruno K Meyer, Andreas Waag, Axel Hoffmann, Jean Geurts, Markus R Wagner, Enno Malguth, Zinc Oxide: From Fundamental Properties Towards Novel Applications ,(2010)
R. Daniel, A. Zeilinger, T. Schöberl, B. Sartory, C. Mitterer, J. Keckes, Microstructure-controlled depth gradients of mechanical properties in thin nanocrystalline films: Towards structure-property gradient functionalization Journal of Applied Physics. ,vol. 117, pp. 235301- ,(2015) , 10.1063/1.4922666
S. Suresh, L. B. Freund, Thin Film Materials: Stress, Defect Formation and Surface Evolution ,(2004)
Milton Ohring, The Materials Science of Thin Films ,(1991)
C. R. Aita, A. J. Purdes, K. L. Lad, P. D. Funkenbusch, The effect of O2 on reactively sputtered zinc oxide Journal of Applied Physics. ,vol. 51, pp. 5533- 5536 ,(1980) , 10.1063/1.327472
Ü Özgür, Ya I Alivov, Chunli Liu, A Teke, MA Reshchikov, S Doğan, V Avrutin, S-J Cho, H Morkoc, None, A comprehensive review of ZnO materials and devices Journal of Applied Physics. ,vol. 98, pp. 041301- ,(2005) , 10.1063/1.1992666