Laser ionization and radio frequency sustainment of high-pressure seeded plasmas
作者： K. L. Kelly , J. E. Scharer , E. S. Paller , G. Ding
DOI: 10.1063/1.1487905
关键词: Ion source 、 Partial pressure 、 Argon 、 Atomic physics 、 Ionization 、 Chemistry 、 Laser 、 Vacuum chamber 、 Atmospheric-pressure laser ionization 、 Plasma
摘要: The feasibility of using a photoionized, low-ionization potential organic seed gas to initiate high pressure plasma discharge is examined and compared radio frequency breakdown argon alone. gas, tetrakis(dimethylamino)ethylene, which has an ionization 6.1 eV ionized by ultraviolet laser through 6.4 photon absorption, forms column inside vacuum chamber. absorbs additional power inductive coupling 13.56 MHz helical antenna wave fields the electron acceleration, ionization, collisional damping. Laser initiation 2–6 mTorr in 1–150 Torr accomplished produces steady-state line-average densities ne≈4×1012 cm−3 volume 300 cm3. two-body recombination coefficient its optimum partial when mixed with are experimentally determined analyzed. Particle loss requirements for maintaini...
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