New structural design of micro-thermoelectric sensor for wide range hydrogen detection
作者： Maiko NISHIBORI , Woosuck SHIN , Lionel F. HOULET , Kazuki TAJIMA , Toshio ITOH
关键词: Hydrogen 、 Ceramic 、 Range (particle radiation) 、 Thermoelectric effect 、 Materials science 、 Gas detector 、 Optoelectronics 、 Hydrogen sensor 、 Chip 、 Ceramic materials 、 Catalysis
摘要: Thermoelectric hydrogen sensor (THS) is a promising candidate for leak alarm system because of its unique, reliable working principle and performance has been improved by fabricating it as micro-device. In this study, we have investigated the micro-THS with new design 4 x mm 2 chip. The integration thermoelectric thin film B-dope SiGe ceramic catalyst Pt 40 mass% loaded alumina into micro hot-plate on membrane, performance. We demonstrated that detected wide range H concentration in air from low 0.5 ppm to high 5 vol%.
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sci-hub.se 参考文章(13)
R. C. Hughes, W. K. Schubert, Thin films of Pd/Ni alloys for detection of high hydrogen concentrations Journal of Applied Physics. ,vol. 71, pp. 542- 544 ,(1992) , 10.1063/1.350646
Tracey K Tromp, Run-Lie Shia, Mark Allen, John M Eiler, Yuk L Yung, Potential environmental impact of a hydrogen economy on the stratosphere. Science. ,vol. 300, pp. 1740- 1742 ,(2003) , 10.1126/SCIENCE.1085169
Isolde Simon, Nicolae Bârsan, Michael Bauer, Udo Weimar, Micromachined metal oxide gas sensors: opportunities to improve sensor performance Sensors and Actuators B: Chemical. ,vol. 73, pp. 1- 26 ,(2001) , 10.1016/S0925-4005(00)00639-0
Y. Choi, K. Tajima, W. Shin, N. Izu, I. Matsubara, N. Murayama, Combustor of ceramic Pt/alumina catalyst and its application for micro-thermoelectric hydrogen sensor Applied Catalysis A-general. ,vol. 287, pp. 19- 24 ,(2005) , 10.1016/J.APCATA.2005.03.004
Woosuck Shin, Kiyohisa Imai, Noriya Izu, Norimitsu Murayama, Thermoelectric Thick-Film Hydrogen Gas Sensor Operating at Room Temperature Japanese Journal of Applied Physics. ,vol. 40, ,(2001) , 10.1143/JJAP.40.L1232
A. Katsuki, K. Fukui, H2 selective gas sensor based on SnO2 Sensors and Actuators B-chemical. ,vol. 52, pp. 30- 37 ,(1998) , 10.1016/S0925-4005(98)00252-4
Woosuck Shin, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama, Kazuki Tajima, Yeongsoo Choi, Micro-Thermoelectric Hydrogen Sensors with Pt Thin Film and Pt∕Alumina Thick Film Catalysts Journal of The Electrochemical Society. ,vol. 153, pp. H58- ,(2006) , 10.1149/1.2165777
M. A. Butler, Optical fiber hydrogen sensor Applied Physics Letters. ,vol. 45, pp. 1007- 1009 ,(1984) , 10.1063/1.95060
Naoya Sawaguchi, Woosuck Shin, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama, Effect of humidity on the sensing property of thermoelectric hydrogen sensor Sensors and Actuators B-chemical. ,vol. 108, pp. 461- 466 ,(2005) , 10.1016/J.SNB.2004.12.078
Woosuck Shin, Masahiko Matsumiya, Noriya Izu, Norimitsu Murayama, Hydrogen-selective thermoelectric gas sensor Sensors and Actuators B-chemical. ,vol. 93, pp. 304- 308 ,(2003) , 10.1016/S0925-4005(03)00225-9