Semiconductor Manufacturing Process Description
作者： Lars Mönch , John W. Fowler , Scott J. Mason
DOI: 10.1007/978-1-4614-4472-5_2
关键词: Process (engineering) 、 Production planning 、 Wafer fabrication 、 Hierarchy 、 Wafer 、 Semiconductor device fabrication 、 Manufacturing engineering 、 Process management 、 Computer science 、 Control (management) 、 Information system
摘要: In this chapter, we provide a process description of semiconductor manufacturing. Therefore, describe the front-end and back-end areas in some detail. We introduce notion base system, process, control planning finally information system from systems theory. Then discuss important wafer fabrication operations including most characteristics manufacturing process. also complex job shops because is way fabs are organized. Finally, production (PPC) hierarchy
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