Mass spectrometric measurement of molecular dissociation in inductively coupled plasmas

摘要: The dissociation fraction of molecules in radio frequency, planar, inductively coupled plasmas are measured for mixtures oxygen, nitrogen, sulfur hexafluoride, and chlorine argon. A modified gaseous electronics conference rf reference cell with an source is used to produce the discharges, pressures ranging from 1.3 Pa 5.3 applied powers 100 W 300 W. Neutrals sampled side discharge, degree determined mass spectrometrically by comparison intensities parent ion peaks plasma power on off. Measured levels O2 Ar:O2 ranged 0.02 (i.e., 2% oxygen were dissociated) 0.08 (8%), while Ar:SF6 0.92 0.98, depending upon conditions. Cl2 Ar:Cl2 near 0.07 0.19, N2 Ar:N2 less than all plasm...