Single-Phase Gas Flow in Microchannels

摘要: The role of rarefaction and its consequences on the behavior gas flows in microchannels are discussed this chapter. Heat transfer thermally driven microflows particularly interesting for vacuum generation, using microsystems without moving parts. main micro-effect that results from shrinking down devices' size is rarefaction. In microchannels, effects those rarefaction, essentially quantified by Knudsen number. Rarefaction affects steady modifies unsteady microflows. case pulsed particular interest because such encountered many applications. Theoretical knowledge currently more advanced than liquid microchannels. regime flow a macrochannel refers to viscosity compressibility Reynolds number Mach depends regime. Generating means concerns various applications as taking biological or chemical samples, control level neighborhood some specific during working. However, there still need accurate experimental data, both microflows, with heat transfer.