Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM.
作者： Xiaoqing He , Matthias J Young , Tommi A White , Yangchuan Xing , Ahmed M Jasim
关键词: Transmission electron microscopy 、 Amorphous solid 、 Chemical physics 、 Atomic layer deposition 、 Reverse Monte Carlo 、 Materials science 、 Synchrotron 、 Thin film 、 Electron diffraction 、 Diffraction
摘要: … the common elastic-scattering physics between X-ray and electron diffraction and linear scaling of both X… In Figure 9c, we report cryo-ePDF traces for ALD AlO x deposition temperatures …
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