Nonequilibrium Properties of Electrons in Oxygen Plasmas

摘要: Theoretical investigations of DC discharge plasmas in reactors with plane electrodes are presented. A multiterm method for the solution space-dependent Boltzmann equation electrons has been adopted and modified to analyze behavior velocity distribution function relevant macroscopic properties electron component oxygen a wide range pressure applied voltage. On basis results, main features kinetics discussed. In particular, analysis shows drastic changes gas transition from regime almost negligible impact collisions at lower collision-dominated plasma higher pressure. Regarding method, it is found that convergent generally obtained, where conventionally used two-term approximation still gives fair results voltages pressures around 100 Pa, but up ten terms required when decreasing by one order magnitude.