Bulk micro-machined wide-band aero-acoustic microphone and its application to acoustic ranging
作者： Z J Zhou , L Rufer , E Salze , P Yuldashev , S Ollivier
DOI: 10.1088/0960-1317/23/10/105006
关键词: Acoustics 、 Equalization (audio) 、 Etching (microfabrication) 、 Noise-canceling microphone 、 Sensitivity (electronics) 、 Materials science 、 500 kHz 、 Ranging 、 Microphone 、 Diaphragm (acoustics)
摘要: A wide-band aero-acoustic microphone was realized using a bulk micro-machining process based on the deep reactive-ion etching of silicon. The sensing diaphragm is completely sealed, thus eliminating loss low-frequency response resulting from pressure equalization through release etch-holes present previously reported implemented surface-micro-machining process. dynamic sensitivity ∼0.33 μV/V/Pa estimated an acoustic shockwave (‘N-wave’) generated custom-built high-voltage electrical spark-discharge system. This value comparable to effective static ∼0.28 measured commercial nano-indenter relatively flat 6 500 kHz, with resonance frequency ∼715 kHz. An array three microphones also constructed and tested demonstrate application these localization high short duration sources. (Some figures may appear in colour only online journal)
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