Analysis of errors in on-wafer measurements due to multimode propagation in CB-CPW
作者： W. Wiatr , A. Lewandowski
DOI:
关键词: Optics 、 Coplanar waveguide 、 Upper and lower bounds 、 Transmission line 、 Calibration 、 Open-circuit voltage 、 Electrical engineering 、 Wafer 、 Scattering 、 Multi-mode optical fiber 、 Physics
摘要: We study for the first time errors in on-wafer scattering parameter measurements caused by parasitic microstrip-like mode propagation conductor-backed coplanar waveguide (CB-CPW). determine upper bound these typical CPW devices such as a matched load, an open circuit, and transmission line section. To this end, we develop electromagnetic-simulations-based multimode three-port model transition between air-coplanar probe CB-CPW. Subsequently, apply to examine device S parameters de-embedded from affected MSL mode. Our analysis demonstrates that CB-CPW may significantly deteriorate S-parameters measured on
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