Wide-band silicon photonic MOEMS spectrometer requiring a single photodetector

摘要: We propose a novel integrated micro-opto-mechanical-system spectrometer design in monochromator setup. It consists of concave grating fabricated planar waveguide that is connected to rotational electrostatic actuator, which enables angular tuning the grating. The covers wide operational wavelength range (>100 nm), covering partially E-band and fully S, C, L-bands (1416.6 nm - 1696.6 requires single photodetector acquire spectrum. designed exhibit low optical losses throughout motion. spectrum can be acquired at frequency 1.76 kHz. simulated features an average insertion loss −1.8 dB crosstalk better than −70 with resolution as 1.62 nm. entire device area 4 mm x 4 based on thick silicon-on-insulator platform.