Characterization of Nb-doped Pb(Zr,Ti)O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications
作者： Takamichi Fujii , Yoshikazu Hishinuma , Tsuyoshi Mita , Takayuki Naono
DOI: 10.1016/J.SNA.2010.08.019
关键词: Materials science 、 Silicon 、 Metallurgy 、 Thin film 、 Sputtering 、 Composite material 、 Piezoelectricity 、 Wafer 、 Substrate (electronics) 、 Microelectromechanical systems 、 Sputter deposition
摘要: … for Pb loss during film formation. The ratio of Zr to Ti was set to be 0.52:0.48 which is MPB ratio. Additionally, 12% Nb was added in order to improve the piezoelectric properties. An RF …
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sci-hub.se 参考文章(21)
Yong Kwan Kim, Hitoshi Morioka, Risako Ueno, Shintaro Yokoyama, Hiroshi Funakubo, Domain structure control of (001)∕(100)-oriented epitaxial Pb(Zr,Ti)O3 films grown on (100)cSrRuO3∕(100)SrTiO3 substrates Applied Physics Letters. ,vol. 86, pp. 212905- ,(2005) , 10.1063/1.1938250
Jin-Rong Cheng, Wenyi Zhu, Nan Li, L. Eric Cross, Electrical properties of sol-gel-derived Pb(Zr0.52Ti0.48)O3 thin films on a PbTiO3-coated stainless steel substrate Applied Physics Letters. ,vol. 81, pp. 4805- 4807 ,(2002) , 10.1063/1.1528288
Takamichi Fujii, Yoshikazu Hishinuma, Tsuyoshi Mita, Takami Arakawa, Preparation of Nb doped PZT film by RF sputtering Solid State Communications. ,vol. 149, pp. 1799- 1802 ,(2009) , 10.1016/J.SSC.2009.07.021
Yukio Sakashita, Toshiyuki Ono, Hideo Segawa, Kouji Tominaga, Masaru Okada, Preparation and electrical properties of MOCVD‐deposited PZT thin films Journal of Applied Physics. ,vol. 69, pp. 8352- 8357 ,(1991) , 10.1063/1.347397
Geoff L. Brennecka, Wayne Huebner, Bruce A. Tuttle, Paul G. Clem, Use of Stress To Produce Highly Oriented Tetragonal Lead Zirconate Titanate (PZT 40/60) Thin Films and Resulting Electrical Properties Journal of the American Ceramic Society. ,vol. 87, pp. 1459- 1465 ,(2004) , 10.1111/J.1551-2916.2004.01459.X
Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa, Toshiyuki Matsunaga, Takeshi Kamada, Ryouichi Takayama, Crystallographic characterization of epitaxial Pb(Zr,Ti)O3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering Journal of Applied Physics. ,vol. 93, pp. 4091- 4096 ,(2003) , 10.1063/1.1558951
P Muralt, Ferroelectric thin films for micro-sensors and actuators: a review Journal of Micromechanics and Microengineering. ,vol. 10, pp. 136- 146 ,(2000) , 10.1088/0960-1317/10/2/307
J Akedo, M Lebedev, Effects of annealing and poling conditions on piezoelectric properties of Pb(Zr0.52,Ti0.48)O3 thick films formed by aerosol deposition method Journal of Crystal Growth. ,vol. 235, pp. 415- 420 ,(2002) , 10.1016/S0022-0248(01)01925-X
Jae-Wung Lee, Gun-Tae Park, Chee-Sung Park, Hyoun-Ee Kim, Enhanced ferroelectric properties of Pb(Zr,Ti)O3 films by inducing permanent compressive stress Applied Physics Letters. ,vol. 88, pp. 072908- ,(2006) , 10.1063/1.2174094
Masaru Shimizu, Hironori Fujisawa, Tadashi Shiosaki, MOCVD of Pb-based ferroelectric oxide thin films Journal of Crystal Growth. ,vol. 174, pp. 464- 472 ,(1997) , 10.1016/S0022-0248(96)01143-8