Simple method to measure the etching rate of monocrystalline silicon in KOH solution
作者： Cheng Chen , Liang Jiang , Peng Zhang , Hongbo Wang , Linmao Qian
关键词: Monocrystalline silicon 、 Composite material 、 Etching rate 、 Silicon 、 Etching (microfabrication) 、 Oxide 、 Layer (electronics) 、 Atomic force microscopy 、 Materials science 、 Microsphere
摘要: … Therefore, the selective etching of silicon in KOH solution … oxide that naturally forms on silicon surface acts as mask film, … on the silicon substrate surface generates selective etching of …
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